ATMI expands epi-wafer foundry services for bipolar, BiCMOS circuits

ATMI expands epi-wafer foundry services for bipolar, BiCMOS circuits
By Semiconductor Business News
May 4, 2000 (5:16 p.m. EST)
URL: http://www.eetimes.com/story/OEG20000504S0033

MESA, Ariz. -- ATMI Inc. today announced plans to quickly expand its production capacity for epitaxial silicon substrates with the addition of eight single-wafer reactors at its Epitronics Silicon Division here.

These eight tools will handle wafer diameters up to 200 mm and they will give the division a total of 36 reactors dedicated to expitaxial services for BiCMOS and bipolar processes. ATMI, based in Danbury, Conn., did not release a figure for the total investment of the expansion.

"Customer demand for Epitronics' BiCMOS epitaxy is escalating rapidly -- BiCMOS devices are integral parts of popular analog circuits for wireless communications and the Internet telecommunications backbone," said Phil Yin, president of the division. "Our customers are demanding more than 120% of our capacity."

Yin said Epitronics was working on an aggressive schedule to put these reactors in place and have them in full production by the end of the second qua rter.